Ptychography for optical metrology with limited translation knowledge.
نویسندگان
چکیده
We introduce unknown-transverse translation diversity phase retrieval: a ptychographic algorithm for optical metrology when a subaperture is translating through a plane conjugate to the exit pupil in a very poorly known fashion. The algorithm estimates the direction of translation and the distance traveled by the subaperture from one point spread function (PSF) to the next. It also estimates unknown point target motion and rotations of the subaperture between PSF acquisitions from the PSF data.
منابع مشابه
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عنوان ژورنال:
- Applied optics
دوره 55 17 شماره
صفحات -
تاریخ انتشار 2016